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R14 Tetrafluoromethane Semi Conductor Size 200 CGA-716 Diss R14 Tetrafluoromethane Semi Conductor Size 200 CGA-716 Diss For Tokyo Electron O2 <2PPM, SF6 <1PPM, N2 <4PPM, Co <1PPM, CO2 <1PPM, H2O <1PPM, Acidity <0.1PPMW, Other Fluorocarbons <2ppm
Airgas Part #: REFR14S200C169
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Actual volume in the cylinder may fluctuate based on numerous conditions
gasType Merch warning message
Airgas Part #:REFR14S200C169
Manufacturer Part #:R14S200C169
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Cylinder contains approximately 70 VOLUME ONLY Pound (LBS)
About this product
Sizes may vary by location.Contact your Airgas representative or local branch location for availability in your area.
